Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis
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Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis
The development of interfacial coherency stresses in TiN/AlN bilayer and multilayer films was investigated by finite element method (ABAQUS) using the four-node bilinear quadrilateral axisymmetric element CAX4R. The TiN and AlN layers are always in compression and tension at the interface, respectively, as may be expected from the fact TiN has larger lattice parameter than AlN. Both, the bi-lay...
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ژورنال
عنوان ژورنال: Computational Materials Science
سال: 2012
ISSN: 0927-0256
DOI: 10.1016/j.commatsci.2011.11.024